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Dynamics of mass transport during nanohole drilling by local droplet etching
Local droplet etching (LDE) utilizes metal droplets during molecular beam epitaxy for the self-assembled drilling of nanoholes into III/V semiconductor surfaces. An essential process during LDE is the removal of the deposited droplet material from its initial position during post-growth annealing. T...
Autores principales: | Heyn, Christian, Bartsch, Thorben, Sanguinetti, Stefano, Jesson, David, Hansen, Wolfgang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385027/ https://www.ncbi.nlm.nih.gov/pubmed/25852364 http://dx.doi.org/10.1186/s11671-015-0779-5 |
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