Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)

Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3) dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric...

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Detalles Bibliográficos
Autores principales: Zhang, Guozhen, Wu, Hao, Chen, Chao, Wang, Ti, Yue, Jin, Liu, Chang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385106/
https://www.ncbi.nlm.nih.gov/pubmed/25852372
http://dx.doi.org/10.1186/s11671-015-0784-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385106/
https://www.ncbi.nlm.nih.gov/pubmed/25852372
http://dx.doi.org/10.1186/s11671-015-0784-8

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