Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)

Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3) dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric...

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Detalles Bibliográficos
Autores principales: Zhang, Guozhen, Wu, Hao, Chen, Chao, Wang, Ti, Yue, Jin, Liu, Chang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385106/
https://www.ncbi.nlm.nih.gov/pubmed/25852372
http://dx.doi.org/10.1186/s11671-015-0784-8
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author Zhang, Guozhen
Wu, Hao
Chen, Chao
Wang, Ti
Yue, Jin
Liu, Chang
author_facet Zhang, Guozhen
Wu, Hao
Chen, Chao
Wang, Ti
Yue, Jin
Liu, Chang
author_sort Zhang, Guozhen
collection PubMed
description Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3) dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10(−8) A/cm(2) at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.
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spelling pubmed-43851062015-04-07 Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3) Zhang, Guozhen Wu, Hao Chen, Chao Wang, Ti Yue, Jin Liu, Chang Nanoscale Res Lett Nano Express Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3) dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10(−8) A/cm(2) at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits. Springer US 2015-02-18 /pmc/articles/PMC4385106/ /pubmed/25852372 http://dx.doi.org/10.1186/s11671-015-0784-8 Text en © Zhang et al.; licensee Springer. 2015 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited.
spellingShingle Nano Express
Zhang, Guozhen
Wu, Hao
Chen, Chao
Wang, Ti
Yue, Jin
Liu, Chang
Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
title Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
title_full Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
title_fullStr Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
title_full_unstemmed Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
title_short Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
title_sort transparent and flexible capacitors based on nanolaminate al(2)o(3)/tio(2)/al(2)o(3)
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385106/
https://www.ncbi.nlm.nih.gov/pubmed/25852372
http://dx.doi.org/10.1186/s11671-015-0784-8
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