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Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3)
Transparent and flexible capacitors based on nanolaminate Al(2)O(3)/TiO(2)/Al(2)O(3) dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385106/ https://www.ncbi.nlm.nih.gov/pubmed/25852372 http://dx.doi.org/10.1186/s11671-015-0784-8 |