The nanostructuring of surfaces and films using interference lithography and chalcogenide photoresist

The reversible and transient photostimulated structural changes in annealed chalcogenide glass (ChG) layers were used to form interference periodic structures on semiconductor surfaces and metal films. It was shown that negative-action etchants based on amines dissolve illuminated parts of a chalcog...

Descripción completa

Detalles Bibliográficos
Autores principales: Dan’ko, Viktor, Indutnyi, Ivan, Myn’ko, Victor, Lukaniuk, Mariia, Shepeliavyi, Petro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Nano Idea
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385117/
https://www.ncbi.nlm.nih.gov/pubmed/25852379
http://dx.doi.org/10.1186/s11671-015-0765-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385117/
https://www.ncbi.nlm.nih.gov/pubmed/25852379
http://dx.doi.org/10.1186/s11671-015-0765-y

Ejemplares similares