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Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
Phase-change access memory (PCM) appears to be the strongest candidate for next-generation high-density nonvolatile memory. The fabrication of ultrahigh-density PCM depends heavily on the thin-film growth technique for the phase-changing chalcogenide material. In this study, Ge(2)Sb(2)Te(5) (GST) an...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385138/ https://www.ncbi.nlm.nih.gov/pubmed/25852385 http://dx.doi.org/10.1186/s11671-015-0815-5 |