High aspect ratio 10-nm-scale nanoaperture arrays with template-guided metal dewetting

We introduce an approach to fabricate ordered arrays of 10-nm-scale silica-filled apertures in a metal film without etching or liftoff. Using low temperature (<400°C) thermal dewetting of metal films guided by nano-patterned templates, apertures with aspect ratios up to 5:1 are demonstrated. Aper...

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Detalles Bibliográficos
Autores principales: Wang, Ying Min, Lu, Liangxing, Srinivasan, Bharathi Madurai, Asbahi, Mohamed, Zhang, Yong Wei, Yang, Joel K. W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4392361/
https://www.ncbi.nlm.nih.gov/pubmed/25858792
http://dx.doi.org/10.1038/srep09654

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4392361/
https://www.ncbi.nlm.nih.gov/pubmed/25858792
http://dx.doi.org/10.1038/srep09654

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