Nano-oxide thin films deposited via atomic layer deposition on microchannel plates

Microchannel plate (MCP) as a key part is a kind of electron multiplied device applied in many scientific fields. Oxide thin films such as zinc oxide doped with aluminum oxide (ZnO:Al(2)O(3)) as conductive layer and pure aluminum oxide (Al(2)O(3)) as secondary electron emission (SEE) layer were prep...

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Detalles Bibliográficos
Autores principales: Yan, Baojun, Liu, Shulin, Heng, Yuekun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4393407/
https://www.ncbi.nlm.nih.gov/pubmed/25883544
http://dx.doi.org/10.1186/s11671-015-0870-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4393407/
https://www.ncbi.nlm.nih.gov/pubmed/25883544
http://dx.doi.org/10.1186/s11671-015-0870-y

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