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Nano-oxide thin films deposited via atomic layer deposition on microchannel plates
Microchannel plate (MCP) as a key part is a kind of electron multiplied device applied in many scientific fields. Oxide thin films such as zinc oxide doped with aluminum oxide (ZnO:Al(2)O(3)) as conductive layer and pure aluminum oxide (Al(2)O(3)) as secondary electron emission (SEE) layer were prep...
Autores principales: | Yan, Baojun, Liu, Shulin, Heng, Yuekun |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4393407/ https://www.ncbi.nlm.nih.gov/pubmed/25883544 http://dx.doi.org/10.1186/s11671-015-0870-y |
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