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AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition
Highly ordered nanoporous anodic aluminum oxide (AAO) thin films were fabricated in oxalic acid under a constant voltage via a two-step anodization process. To investigate the high-aspect-ratio (7.5:1) filling process, both sputtering and atomic layer deposition (ALD) were used to form TiO(2) nanowi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4397218/ https://www.ncbi.nlm.nih.gov/pubmed/25897309 http://dx.doi.org/10.1186/s11671-015-0872-9 |