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AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition
Highly ordered nanoporous anodic aluminum oxide (AAO) thin films were fabricated in oxalic acid under a constant voltage via a two-step anodization process. To investigate the high-aspect-ratio (7.5:1) filling process, both sputtering and atomic layer deposition (ALD) were used to form TiO(2) nanowi...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4397218/ https://www.ncbi.nlm.nih.gov/pubmed/25897309 http://dx.doi.org/10.1186/s11671-015-0872-9 |
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author | Yao, Zhao Wang, Cong Li, Yang Kim, Nam-Young |
author_facet | Yao, Zhao Wang, Cong Li, Yang Kim, Nam-Young |
author_sort | Yao, Zhao |
collection | PubMed |
description | Highly ordered nanoporous anodic aluminum oxide (AAO) thin films were fabricated in oxalic acid under a constant voltage via a two-step anodization process. To investigate the high-aspect-ratio (7.5:1) filling process, both sputtering and atomic layer deposition (ALD) were used to form TiO(2) nanowires. Field emission scanning electron microscopy and high-resolution transmission electron microscopy images indicated that mushroom-like TiO(2) structures were sputtered onto the AAO template surface, and the ALD-coated TiO(2) exhibited fine filling results and clear crystal grain boundaries. Large-scale and free-standing TiO(2) nanowire arrays were liberated by selectively removing the aluminum substrate and AAO template via a wet etching process with no collapsing or agglomeration after the drying process. ALD-deposited TiO(2) nanowire arrays that were 67 nm in diameter and 400 nm high were transferred from the AAO template. The ALD process enabled the rapid, simple synthesis of highly ordered TiO(2) nanowire arrays with desired parameters such as diameter, density, and thickness determined using diverse AAO templates. |
format | Online Article Text |
id | pubmed-4397218 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2015 |
publisher | Springer US |
record_format | MEDLINE/PubMed |
spelling | pubmed-43972182015-04-20 AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition Yao, Zhao Wang, Cong Li, Yang Kim, Nam-Young Nanoscale Res Lett Nano Express Highly ordered nanoporous anodic aluminum oxide (AAO) thin films were fabricated in oxalic acid under a constant voltage via a two-step anodization process. To investigate the high-aspect-ratio (7.5:1) filling process, both sputtering and atomic layer deposition (ALD) were used to form TiO(2) nanowires. Field emission scanning electron microscopy and high-resolution transmission electron microscopy images indicated that mushroom-like TiO(2) structures were sputtered onto the AAO template surface, and the ALD-coated TiO(2) exhibited fine filling results and clear crystal grain boundaries. Large-scale and free-standing TiO(2) nanowire arrays were liberated by selectively removing the aluminum substrate and AAO template via a wet etching process with no collapsing or agglomeration after the drying process. ALD-deposited TiO(2) nanowire arrays that were 67 nm in diameter and 400 nm high were transferred from the AAO template. The ALD process enabled the rapid, simple synthesis of highly ordered TiO(2) nanowire arrays with desired parameters such as diameter, density, and thickness determined using diverse AAO templates. Springer US 2015-04-08 /pmc/articles/PMC4397218/ /pubmed/25897309 http://dx.doi.org/10.1186/s11671-015-0872-9 Text en © Yao et al.; licensee Springer. 2015 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited. |
spellingShingle | Nano Express Yao, Zhao Wang, Cong Li, Yang Kim, Nam-Young AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition |
title | AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition |
title_full | AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition |
title_fullStr | AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition |
title_full_unstemmed | AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition |
title_short | AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition |
title_sort | aao-assisted synthesis of highly ordered, large-scale tio(2) nanowire arrays via sputtering and atomic layer deposition |
topic | Nano Express |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4397218/ https://www.ncbi.nlm.nih.gov/pubmed/25897309 http://dx.doi.org/10.1186/s11671-015-0872-9 |
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