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AAO-assisted synthesis of highly ordered, large-scale TiO(2) nanowire arrays via sputtering and atomic layer deposition

Highly ordered nanoporous anodic aluminum oxide (AAO) thin films were fabricated in oxalic acid under a constant voltage via a two-step anodization process. To investigate the high-aspect-ratio (7.5:1) filling process, both sputtering and atomic layer deposition (ALD) were used to form TiO(2) nanowi...

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Detalles Bibliográficos
Autores principales:	Yao, Zhao, Wang, Cong, Li, Yang, Kim, Nam-Young
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2015
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4397218/ https://www.ncbi.nlm.nih.gov/pubmed/25897309 http://dx.doi.org/10.1186/s11671-015-0872-9

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