Stencil Nano Lithography Based on a Nanoscale Polymer Shadow Mask: Towards Organic Nanoelectronics

A stencil lithography technique has been developed to fabricate organic-material-based electronic devices with sub-micron resolution. Suspended polymethylmethacrylate (PMMA) membranes were used as shadow masks for defining organic channels and top electrodes. Arrays of pentacene field effect transis...

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Detalles Bibliográficos
Autores principales: Yun, Hoyeol, Kim, Sangwook, Kim, Hakseong, Lee, Junghyun, McAllister, Kirstie, Kim, Junhyung, Pyo, Sengmoon, Sung Kim, Jun, Campbell, Eleanor E. B., Hyoung Lee, Wi, Wook Lee, Sang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4426698/
https://www.ncbi.nlm.nih.gov/pubmed/25959389
http://dx.doi.org/10.1038/srep10220

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4426698/
https://www.ncbi.nlm.nih.gov/pubmed/25959389
http://dx.doi.org/10.1038/srep10220

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