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Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing
In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip g...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431190/ https://www.ncbi.nlm.nih.gov/pubmed/25894935 http://dx.doi.org/10.3390/s150408919 |