Optimization of Capacitive Acoustic Resonant Sensor Using Numerical Simulation and Design of Experiment

Optimization of the acoustic resonant sensor requires a clear understanding of how the output responses of the sensor are affected by the variation of different factors. During this work, output responses of a capacitive acoustic transducer, such as membrane displacement, quality factor, and capacit...

Descripción completa

Detalles Bibliográficos
Autores principales: Haque, Rubaiyet Iftekharul, Loussert, Christophe, Sergent, Michelle, Benaben, Patrick, Boddaert, Xavier
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431226/
https://www.ncbi.nlm.nih.gov/pubmed/25894937
http://dx.doi.org/10.3390/s150408945

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431226/
https://www.ncbi.nlm.nih.gov/pubmed/25894937
http://dx.doi.org/10.3390/s150408945

Ejemplares similares