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Optimization of Capacitive Acoustic Resonant Sensor Using Numerical Simulation and Design of Experiment
Optimization of the acoustic resonant sensor requires a clear understanding of how the output responses of the sensor are affected by the variation of different factors. During this work, output responses of a capacitive acoustic transducer, such as membrane displacement, quality factor, and capacit...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431226/ https://www.ncbi.nlm.nih.gov/pubmed/25894937 http://dx.doi.org/10.3390/s150408945 |