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An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators

Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many...

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Detalles Bibliográficos
Autores principales: Li, Pu, Fang, Yuming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431299/
https://www.ncbi.nlm.nih.gov/pubmed/25815453
http://dx.doi.org/10.3390/s150407388