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An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators
Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many...
Autores principales: | Li, Pu, Fang, Yuming |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431299/ https://www.ncbi.nlm.nih.gov/pubmed/25815453 http://dx.doi.org/10.3390/s150407388 |
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