Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accelerometer are determined, and thermal deformation o...

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Detalles Bibliográficos
Autores principales: Liu, Guangjun, Yang, Feng, Bao, Xiaofan, Jiang, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4435161/
https://www.ncbi.nlm.nih.gov/pubmed/25785308
http://dx.doi.org/10.3390/s150306342

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4435161/
https://www.ncbi.nlm.nih.gov/pubmed/25785308
http://dx.doi.org/10.3390/s150306342

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