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Robust Optimization of a MEMS Accelerometer Considering Temperature Variations
A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accelerometer are determined, and thermal deformation o...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4435161/ https://www.ncbi.nlm.nih.gov/pubmed/25785308 http://dx.doi.org/10.3390/s150306342 |