A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...

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Detalles Bibliográficos
Autores principales: Deng, Fangming, He, Yigang, Li, Bing, Zuo, Lei, Wu, Xiang, Fu, Zhihui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4435218/
https://www.ncbi.nlm.nih.gov/pubmed/25806868
http://dx.doi.org/10.3390/s150306872

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4435218/
https://www.ncbi.nlm.nih.gov/pubmed/25806868
http://dx.doi.org/10.3390/s150306872

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