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Circular test structure for the determination of piezoelectric constants of Sc(x)Al(1−x)N thin films applying Laser Doppler Vibrometry and FEM simulations()
Piezoelectric scandium aluminium nitride (Sc(x)Al(1−x)N) thin films offer a large potential for the application in micro electromechanical systems, as advantageous properties of pure AlN thin films are maintained, but combined with an increased piezoelectric actuation and sensing potential. Sc(x)Al(...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier Sequoia
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461150/ https://www.ncbi.nlm.nih.gov/pubmed/26109748 http://dx.doi.org/10.1016/j.sna.2014.10.024 |