Circular test structure for the determination of piezoelectric constants of Sc(x)Al(1−x)N thin films applying Laser Doppler Vibrometry and FEM simulations()

Piezoelectric scandium aluminium nitride (Sc(x)Al(1−x)N) thin films offer a large potential for the application in micro electromechanical systems, as advantageous properties of pure AlN thin films are maintained, but combined with an increased piezoelectric actuation and sensing potential. Sc(x)Al(...

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Detalles Bibliográficos
Autores principales: Mayrhofer, P.M., Euchner, H., Bittner, A., Schmid, U.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier Sequoia 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461150/
https://www.ncbi.nlm.nih.gov/pubmed/26109748
http://dx.doi.org/10.1016/j.sna.2014.10.024

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461150/
https://www.ncbi.nlm.nih.gov/pubmed/26109748
http://dx.doi.org/10.1016/j.sna.2014.10.024

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