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Circular test structure for the determination of piezoelectric constants of Sc(x)Al(1−x)N thin films applying Laser Doppler Vibrometry and FEM simulations()
Piezoelectric scandium aluminium nitride (Sc(x)Al(1−x)N) thin films offer a large potential for the application in micro electromechanical systems, as advantageous properties of pure AlN thin films are maintained, but combined with an increased piezoelectric actuation and sensing potential. Sc(x)Al(...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier Sequoia
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461150/ https://www.ncbi.nlm.nih.gov/pubmed/26109748 http://dx.doi.org/10.1016/j.sna.2014.10.024 |