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Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires

[Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence...

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Detalles Bibliográficos
Autores principales: Johannes, Andreas, Noack, Stefan, Wesch, Werner, Glaser, Markus, Lugstein, Alois, Ronning, Carsten
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2015
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4463547/
https://www.ncbi.nlm.nih.gov/pubmed/25951108
http://dx.doi.org/10.1021/acs.nanolett.5b00431