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Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires

[Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence...

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Autores principales: Johannes, Andreas, Noack, Stefan, Wesch, Werner, Glaser, Markus, Lugstein, Alois, Ronning, Carsten
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2015
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4463547/
https://www.ncbi.nlm.nih.gov/pubmed/25951108
http://dx.doi.org/10.1021/acs.nanolett.5b00431
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author Johannes, Andreas
Noack, Stefan
Wesch, Werner
Glaser, Markus
Lugstein, Alois
Ronning, Carsten
author_facet Johannes, Andreas
Noack, Stefan
Wesch, Werner
Glaser, Markus
Lugstein, Alois
Ronning, Carsten
author_sort Johannes, Andreas
collection PubMed
description [Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence of the sputtering shows a maximum if the ion range matches the nanowire diameter, which is in good agreement with Monte Carlo simulations based on binary collisions. Nanowires irradiated at room temperature, however, amorphize and deform plastically. So far, plastic deformation has not been observed in bulk silicon at such low ion energies. The magnitude and direction of the deformation is independent of the ion-beam direction and cannot be explained with mass-transport in a binary collision cascade but only by collective movement of atoms in the collision cascade with the given boundary conditions of a high surface to volume ratio.
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spelling pubmed-44635472015-06-14 Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires Johannes, Andreas Noack, Stefan Wesch, Werner Glaser, Markus Lugstein, Alois Ronning, Carsten Nano Lett [Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence of the sputtering shows a maximum if the ion range matches the nanowire diameter, which is in good agreement with Monte Carlo simulations based on binary collisions. Nanowires irradiated at room temperature, however, amorphize and deform plastically. So far, plastic deformation has not been observed in bulk silicon at such low ion energies. The magnitude and direction of the deformation is independent of the ion-beam direction and cannot be explained with mass-transport in a binary collision cascade but only by collective movement of atoms in the collision cascade with the given boundary conditions of a high surface to volume ratio. American Chemical Society 2015-05-07 2015-06-10 /pmc/articles/PMC4463547/ /pubmed/25951108 http://dx.doi.org/10.1021/acs.nanolett.5b00431 Text en Copyright © 2015 American Chemical Society This is an open access article published under a Creative Commons Attribution (CC-BY) License (http://pubs.acs.org/page/policy/authorchoice_ccby_termsofuse.html) , which permits unrestricted use, distribution and reproduction in any medium, provided the author and source are cited.
spellingShingle Johannes, Andreas
Noack, Stefan
Wesch, Werner
Glaser, Markus
Lugstein, Alois
Ronning, Carsten
Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
title Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
title_full Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
title_fullStr Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
title_full_unstemmed Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
title_short Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
title_sort anomalous plastic deformation and sputtering of ion irradiated silicon nanowires
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4463547/
https://www.ncbi.nlm.nih.gov/pubmed/25951108
http://dx.doi.org/10.1021/acs.nanolett.5b00431
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