Cargando…
Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
[Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence...
Autores principales: | , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2015
|
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4463547/ https://www.ncbi.nlm.nih.gov/pubmed/25951108 http://dx.doi.org/10.1021/acs.nanolett.5b00431 |
_version_ | 1782375783821475840 |
---|---|
author | Johannes, Andreas Noack, Stefan Wesch, Werner Glaser, Markus Lugstein, Alois Ronning, Carsten |
author_facet | Johannes, Andreas Noack, Stefan Wesch, Werner Glaser, Markus Lugstein, Alois Ronning, Carsten |
author_sort | Johannes, Andreas |
collection | PubMed |
description | [Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence of the sputtering shows a maximum if the ion range matches the nanowire diameter, which is in good agreement with Monte Carlo simulations based on binary collisions. Nanowires irradiated at room temperature, however, amorphize and deform plastically. So far, plastic deformation has not been observed in bulk silicon at such low ion energies. The magnitude and direction of the deformation is independent of the ion-beam direction and cannot be explained with mass-transport in a binary collision cascade but only by collective movement of atoms in the collision cascade with the given boundary conditions of a high surface to volume ratio. |
format | Online Article Text |
id | pubmed-4463547 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2015 |
publisher | American Chemical Society |
record_format | MEDLINE/PubMed |
spelling | pubmed-44635472015-06-14 Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires Johannes, Andreas Noack, Stefan Wesch, Werner Glaser, Markus Lugstein, Alois Ronning, Carsten Nano Lett [Image: see text] Silicon nanowires of various diameters were irradiated with 100 keV and 300 keV Ar(+) ions on a rotatable and heatable stage. Irradiation at elevated temperatures above 300 °C retains the geometry of the nanostructure and sputtering can be gauged accurately. The diameter dependence of the sputtering shows a maximum if the ion range matches the nanowire diameter, which is in good agreement with Monte Carlo simulations based on binary collisions. Nanowires irradiated at room temperature, however, amorphize and deform plastically. So far, plastic deformation has not been observed in bulk silicon at such low ion energies. The magnitude and direction of the deformation is independent of the ion-beam direction and cannot be explained with mass-transport in a binary collision cascade but only by collective movement of atoms in the collision cascade with the given boundary conditions of a high surface to volume ratio. American Chemical Society 2015-05-07 2015-06-10 /pmc/articles/PMC4463547/ /pubmed/25951108 http://dx.doi.org/10.1021/acs.nanolett.5b00431 Text en Copyright © 2015 American Chemical Society This is an open access article published under a Creative Commons Attribution (CC-BY) License (http://pubs.acs.org/page/policy/authorchoice_ccby_termsofuse.html) , which permits unrestricted use, distribution and reproduction in any medium, provided the author and source are cited. |
spellingShingle | Johannes, Andreas Noack, Stefan Wesch, Werner Glaser, Markus Lugstein, Alois Ronning, Carsten Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires |
title | Anomalous Plastic Deformation and Sputtering of Ion
Irradiated Silicon Nanowires |
title_full | Anomalous Plastic Deformation and Sputtering of Ion
Irradiated Silicon Nanowires |
title_fullStr | Anomalous Plastic Deformation and Sputtering of Ion
Irradiated Silicon Nanowires |
title_full_unstemmed | Anomalous Plastic Deformation and Sputtering of Ion
Irradiated Silicon Nanowires |
title_short | Anomalous Plastic Deformation and Sputtering of Ion
Irradiated Silicon Nanowires |
title_sort | anomalous plastic deformation and sputtering of ion
irradiated silicon nanowires |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4463547/ https://www.ncbi.nlm.nih.gov/pubmed/25951108 http://dx.doi.org/10.1021/acs.nanolett.5b00431 |
work_keys_str_mv | AT johannesandreas anomalousplasticdeformationandsputteringofionirradiatedsiliconnanowires AT noackstefan anomalousplasticdeformationandsputteringofionirradiatedsiliconnanowires AT weschwerner anomalousplasticdeformationandsputteringofionirradiatedsiliconnanowires AT glasermarkus anomalousplasticdeformationandsputteringofionirradiatedsiliconnanowires AT lugsteinalois anomalousplasticdeformationandsputteringofionirradiatedsiliconnanowires AT ronningcarsten anomalousplasticdeformationandsputteringofionirradiatedsiliconnanowires |