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A Resonant Pressure Microsensor Capable of Self-Temperature Compensation

Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This pap...

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Detalles Bibliográficos
Autores principales: Li, Yinan, Wang, Junbo, Luo, Zhenyu, Chen, Deyong, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4481888/
https://www.ncbi.nlm.nih.gov/pubmed/25938197
http://dx.doi.org/10.3390/s150510048