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Two-dimensional in situ metrology of X-ray mirrors using the speckle scanning technique
In situ metrology overcomes many of the limitations of existing metrology techniques and is capable of exceeding the performance of present-day optics. A novel technique for precisely characterizing an X-ray bimorph mirror and deducing its two-dimensional (2D) slope error map is presented. This tech...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
International Union of Crystallography
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4489535/ https://www.ncbi.nlm.nih.gov/pubmed/26134795 http://dx.doi.org/10.1107/S1600577515006657 |