Design Procedure and Fabrication of Reproducible Silicon Vernier Devices for High-Performance Refractive Index Sensing

In this paper, we propose a generalized procedure for the design of integrated Vernier devices for high performance chemical and biochemical sensing. In particular, we demonstrate the accurate control of the most critical design and fabrication parameters of silicon-on-insulator cascade-coupled race...

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Detalles Bibliográficos
Autores principales: Troia, Benedetto, Khokhar, Ali Z., Nedeljkovic, Milos, Reynolds, Scott A., Hu, Youfang, Mashanovich, Goran Z., Passaro, Vittorio M. N.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4507709/
https://www.ncbi.nlm.nih.gov/pubmed/26067193
http://dx.doi.org/10.3390/s150613548

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4507709/
https://www.ncbi.nlm.nih.gov/pubmed/26067193
http://dx.doi.org/10.3390/s150613548

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