Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed...

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Detalles Bibliográficos
Autores principales: Ramadan, Khaled Sayed Elbadawi, Evoy, Stephane
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Public Library of Science 2015
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4508053/
https://www.ncbi.nlm.nih.gov/pubmed/26193701
http://dx.doi.org/10.1371/journal.pone.0133479

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4508053/
https://www.ncbi.nlm.nih.gov/pubmed/26193701
http://dx.doi.org/10.1371/journal.pone.0133479

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