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Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed...

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Detalles Bibliográficos
Autores principales:	Ramadan, Khaled Sayed Elbadawi, Evoy, Stephane
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Public Library of Science 2015
Materias:	Research Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4508053/ https://www.ncbi.nlm.nih.gov/pubmed/26193701 http://dx.doi.org/10.1371/journal.pone.0133479

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