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Automated Defect and Correlation Length Analysis of Block Copolymer Thin Film Nanopatterns
Line patterns produced by lamellae- and cylinder-forming block copolymer (BCP) thin films are of widespread interest for their potential to enable nanoscale patterning over large areas. In order for such patterning methods to effectively integrate with current technologies, the resulting patterns ne...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Public Library of Science
2015
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4514826/ https://www.ncbi.nlm.nih.gov/pubmed/26207990 http://dx.doi.org/10.1371/journal.pone.0133088 |