Nanoscale Nitrogen Doping in Silicon by Self-Assembled Monolayers

This Report presents a nitrogen-doping method by chemically forming self-assembled monolayers on silicon. Van der Pauw technique, secondary-ion mass spectroscopy and low temperature Hall effect measurements are employed to characterize the nitrogen dopants. The experimental data show that the diffus...

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Detalles Bibliográficos
Autores principales: Guan, Bin, Siampour, Hamidreza, Fan, Zhao, Wang, Shun, Kong, Xiang Yang, Mesli, Abdelmadjid, Zhang, Jian, Dan, Yaping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4521158/
https://www.ncbi.nlm.nih.gov/pubmed/26227342
http://dx.doi.org/10.1038/srep12641

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4521158/
https://www.ncbi.nlm.nih.gov/pubmed/26227342
http://dx.doi.org/10.1038/srep12641

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