MEMS Young’s Modulus and Step Height Measurements With Round Robin Results

This paper presents the results of a microelectromechanical systems (MEMS) Young’s modulus and step height round robin experiment, completed in April 2009, which compares Young’s modulus and step height measurement results at a number of laboratories. The purpose of the round robin was to provide da...

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Detalles Bibliográficos
Autores principales: Marshall, Janet, Allen, Richard A., McGray, Craig D., Geist, Jon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4548872/
https://www.ncbi.nlm.nih.gov/pubmed/27134790
http://dx.doi.org/10.6028/jres.115.023

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4548872/
https://www.ncbi.nlm.nih.gov/pubmed/27134790
http://dx.doi.org/10.6028/jres.115.023

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