Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate

High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH(3) pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a v...

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Detalles Bibliográficos
Autores principales: Tran, Binh Tinh, Hirayama, Hideki, Maeda, Noritoshi, Jo, Masafumi, Toyoda, Shiro, Kamata, Norihiko
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4593966/
https://www.ncbi.nlm.nih.gov/pubmed/26439169
http://dx.doi.org/10.1038/srep14734

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4593966/
https://www.ncbi.nlm.nih.gov/pubmed/26439169
http://dx.doi.org/10.1038/srep14734

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