Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate

High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH(3) pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a v...

Descripción completa

Detalles Bibliográficos
Autores principales: Tran, Binh Tinh, Hirayama, Hideki, Maeda, Noritoshi, Jo, Masafumi, Toyoda, Shiro, Kamata, Norihiko
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4593966/
https://www.ncbi.nlm.nih.gov/pubmed/26439169
http://dx.doi.org/10.1038/srep14734
_version_ 1782393387443290112
author Tran, Binh Tinh
Hirayama, Hideki
Maeda, Noritoshi
Jo, Masafumi
Toyoda, Shiro
Kamata, Norihiko
author_facet Tran, Binh Tinh
Hirayama, Hideki
Maeda, Noritoshi
Jo, Masafumi
Toyoda, Shiro
Kamata, Norihiko
author_sort Tran, Binh Tinh
collection PubMed
description High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH(3) pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a very high growth rate on the substrates. The AlN template had full widths at half maximum of 0.23° and 0.37° for the (002) and (102) reflection planes in X-ray diffraction rocking curves. Atomic force microscopy and transmission electron microscopy confirmed that the roughness of the surface was low (3.5 nm) and the dislocation density was very low (1.5 × 10(8) cm(−2) (screw), 3.7 × 10(8) (edge) cm(−2)).
format Online
Article
Text
id pubmed-4593966
institution National Center for Biotechnology Information
language English
publishDate 2015
publisher Nature Publishing Group
record_format MEDLINE/PubMed
spelling pubmed-45939662015-10-19 Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate Tran, Binh Tinh Hirayama, Hideki Maeda, Noritoshi Jo, Masafumi Toyoda, Shiro Kamata, Norihiko Sci Rep Article High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH(3) pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a very high growth rate on the substrates. The AlN template had full widths at half maximum of 0.23° and 0.37° for the (002) and (102) reflection planes in X-ray diffraction rocking curves. Atomic force microscopy and transmission electron microscopy confirmed that the roughness of the surface was low (3.5 nm) and the dislocation density was very low (1.5 × 10(8) cm(−2) (screw), 3.7 × 10(8) (edge) cm(−2)). Nature Publishing Group 2015-10-06 /pmc/articles/PMC4593966/ /pubmed/26439169 http://dx.doi.org/10.1038/srep14734 Text en Copyright © 2015, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Tran, Binh Tinh
Hirayama, Hideki
Maeda, Noritoshi
Jo, Masafumi
Toyoda, Shiro
Kamata, Norihiko
Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
title Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
title_full Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
title_fullStr Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
title_full_unstemmed Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
title_short Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
title_sort direct growth and controlled coalescence of thick aln template on micro-circle patterned si substrate
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4593966/
https://www.ncbi.nlm.nih.gov/pubmed/26439169
http://dx.doi.org/10.1038/srep14734
work_keys_str_mv AT tranbinhtinh directgrowthandcontrolledcoalescenceofthickalntemplateonmicrocirclepatternedsisubstrate
AT hirayamahideki directgrowthandcontrolledcoalescenceofthickalntemplateonmicrocirclepatternedsisubstrate
AT maedanoritoshi directgrowthandcontrolledcoalescenceofthickalntemplateonmicrocirclepatternedsisubstrate
AT jomasafumi directgrowthandcontrolledcoalescenceofthickalntemplateonmicrocirclepatternedsisubstrate
AT toyodashiro directgrowthandcontrolledcoalescenceofthickalntemplateonmicrocirclepatternedsisubstrate
AT kamatanorihiko directgrowthandcontrolledcoalescenceofthickalntemplateonmicrocirclepatternedsisubstrate

Ejemplares similares