Cargando…
Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH(3) pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a v...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2015
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4593966/ https://www.ncbi.nlm.nih.gov/pubmed/26439169 http://dx.doi.org/10.1038/srep14734 |