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Large-Area Growth of Uniform Single-Layer MoS(2) Thin Films by Chemical Vapor Deposition
We report the largest-size thin films of uniform single-layer MoS(2) on sapphire substrates grown by chemical vapor deposition based on the reaction of gaseous MoO(3) and S evaporated from solid sources. The as-grown thin films of single-layer MoS(2) were continuous and uniform in thickness for more...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4595407/ https://www.ncbi.nlm.nih.gov/pubmed/26439617 http://dx.doi.org/10.1186/s11671-015-1094-x |