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Large-Area Growth of Uniform Single-Layer MoS(2) Thin Films by Chemical Vapor Deposition

We report the largest-size thin films of uniform single-layer MoS(2) on sapphire substrates grown by chemical vapor deposition based on the reaction of gaseous MoO(3) and S evaporated from solid sources. The as-grown thin films of single-layer MoS(2) were continuous and uniform in thickness for more...

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Detalles Bibliográficos
Autores principales: Baek, Seung Hyun, Choi, Yura, Choi, Woong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4595407/
https://www.ncbi.nlm.nih.gov/pubmed/26439617
http://dx.doi.org/10.1186/s11671-015-1094-x