Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function

This paper presents the design and realization of a three degrees of freedom (DOFs) displacement measurement system composed of Hall sensors, which is built for the XYθz displacement measurement of the short stroke stage of the reticle stage of lithography. The measurement system consists of three p...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhao, Bo, Wang, Lei, Tan, Jiu-Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610456/
https://www.ncbi.nlm.nih.gov/pubmed/26370993
http://dx.doi.org/10.3390/s150922530

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610456/
https://www.ncbi.nlm.nih.gov/pubmed/26370993
http://dx.doi.org/10.3390/s150922530

Ejemplares similares