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Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of in...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4634389/ https://www.ncbi.nlm.nih.gov/pubmed/26512671 http://dx.doi.org/10.3390/s151027047 |