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Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of in...

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Detalles Bibliográficos
Autores principales:	Fong, Chien-Fu, Dai, Ching-Liang, Wu, Chyan-Chyi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4634389/ https://www.ncbi.nlm.nih.gov/pubmed/26512671 http://dx.doi.org/10.3390/s151027047

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