Methodology to analyse small silicon samples by glow discharge mass spectrometry using a thin wafer mask

Glow discharge mass spectrometry (GDMS) is widely used for trace element analysis of bulk solid samples. The geometry of the GD source limits the minimum size of the sample, which for the instrument used in this work (ThermoElementGD) is 20 mm in diameter. From time to time, there is the need to ana...

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Detalles Bibliográficos
Autores principales: Modanese, C., Arnberg, L., Di Sabatino, M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2015
Materias:
Materials Science
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4644257/
https://www.ncbi.nlm.nih.gov/pubmed/26649274
http://dx.doi.org/10.1016/j.mex.2015.10.005

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4644257/
https://www.ncbi.nlm.nih.gov/pubmed/26649274
http://dx.doi.org/10.1016/j.mex.2015.10.005

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