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Methodology to analyse small silicon samples by glow discharge mass spectrometry using a thin wafer mask
Glow discharge mass spectrometry (GDMS) is widely used for trace element analysis of bulk solid samples. The geometry of the GD source limits the minimum size of the sample, which for the instrument used in this work (ThermoElementGD) is 20 mm in diameter. From time to time, there is the need to ana...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2015
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4644257/ https://www.ncbi.nlm.nih.gov/pubmed/26649274 http://dx.doi.org/10.1016/j.mex.2015.10.005 |