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Fabrication of ordered arrays of micro- and nanoscale features with control over their shape and size via templated solid-state dewetting

Templated solid-state dewetting of single-crystal films has been shown to be used to produce regular patterns of various shapes. However, the materials for which this patterning method is applicable, and the size range of the patterns produced are still limited. Here, it is shown that ordered arrays...

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Detalles Bibliográficos
Autor principal: Ye, Jongpil
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4650760/
https://www.ncbi.nlm.nih.gov/pubmed/25951816
http://dx.doi.org/10.1038/srep09823