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Fabrication of ordered arrays of micro- and nanoscale features with control over their shape and size via templated solid-state dewetting
Templated solid-state dewetting of single-crystal films has been shown to be used to produce regular patterns of various shapes. However, the materials for which this patterning method is applicable, and the size range of the patterns produced are still limited. Here, it is shown that ordered arrays...
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Formato: | Online Artículo Texto |
Lenguaje: | English |
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Nature Publishing Group
2015
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4650760/ https://www.ncbi.nlm.nih.gov/pubmed/25951816 http://dx.doi.org/10.1038/srep09823 |