Direct Deposition of Uniform High-κ Dielectrics on Graphene

High quality High-κ dielectrics on graphene were achieved by atomic layer deposition directly using remote oxygen plasma surface pretreatment. The uniform coverage on graphene is illustrated by atomic force microscopy and confirmed by high resolution transmission microscopy. The possible surface lat...

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Detalles Bibliográficos
Autores principales: Zhou, Peng, Yang, Songbo, Sun, Qingqing, Chen, Lin, Wang, Pengfei, Ding, Shijin, Zhang, David Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4650933/
https://www.ncbi.nlm.nih.gov/pubmed/25264077
http://dx.doi.org/10.1038/srep06448

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4650933/
https://www.ncbi.nlm.nih.gov/pubmed/25264077
http://dx.doi.org/10.1038/srep06448

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