Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy

This paper describes a detailed computational model of the interaction between an atomic force microscope probe tip and a sample surface. The model provides analyses of dynamic behaviors of the tip to estimate the probe deflections due to surface intermittent contact and the resulting dimensional bi...

Descripción completa

Detalles Bibliográficos
Autores principales: Feng, Shaw C., Joung, Che Bong, Vorburger, Theodore V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4651605/
https://www.ncbi.nlm.nih.gov/pubmed/27504222
http://dx.doi.org/10.6028/jres.114.014

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4651605/
https://www.ncbi.nlm.nih.gov/pubmed/27504222
http://dx.doi.org/10.6028/jres.114.014

Ejemplares similares