Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy

This paper describes a detailed computational model of the interaction between an atomic force microscope probe tip and a sample surface. The model provides analyses of dynamic behaviors of the tip to estimate the probe deflections due to surface intermittent contact and the resulting dimensional bi...

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Detalles Bibliográficos
Autores principales: Feng, Shaw C., Joung, Che Bong, Vorburger, Theodore V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4651605/
https://www.ncbi.nlm.nih.gov/pubmed/27504222
http://dx.doi.org/10.6028/jres.114.014

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