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Will Future Measurement Needs of the Semiconductor Industry Be Met?
We discuss the ability of the nation’s measurement system to meet future metrology needs of the semiconductor industry. Lacking an acceptable metric for assessing the health of metrology for the semiconductor industry, we identify a limited set of unmet measurement needs. Assuming that this set of n...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2007
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4654602/ https://www.ncbi.nlm.nih.gov/pubmed/27110452 http://dx.doi.org/10.6028/jres.112.002 |