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Influence of Content of Al(2)O(3) on Structure and Properties of Nanocomposite Nb-B-Al-O films
Nb-B-Al-O nanocomposite films with different power of Al(2)O(3) were successfully deposited on the Si substrate via multi-target magnetron co-sputtering method. The influences of Al(2)O(3)’s content on structure and properties of obtained nanocomposite films through controlling Al(2)O(3)’s power wer...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4656258/ https://www.ncbi.nlm.nih.gov/pubmed/26597298 http://dx.doi.org/10.1186/s11671-015-1149-z |