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Influence of Content of Al(2)O(3) on Structure and Properties of Nanocomposite Nb-B-Al-O films

Nb-B-Al-O nanocomposite films with different power of Al(2)O(3) were successfully deposited on the Si substrate via multi-target magnetron co-sputtering method. The influences of Al(2)O(3)’s content on structure and properties of obtained nanocomposite films through controlling Al(2)O(3)’s power wer...

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Detalles Bibliográficos
Autores principales: Liu, Na, Dong, Lei, Yu, Jiangang, Pan, Yupeng, Wan, Rongxin, Gu, Hanqing, Li, Dejun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4656258/
https://www.ncbi.nlm.nih.gov/pubmed/26597298
http://dx.doi.org/10.1186/s11671-015-1149-z